Bhagavatapurana 2.5.24

2.5.24

so 'haṅkāra iti prokto vikurvan samabhūt tridhā /
vaikārikastaijasaśca tāmasaśceti yadbhidā /
dravyaśaktiḥ kriyāśaktirjñānaśaktiriti prabho //

24. That thing is known by the name Ahankara—which, changing, became transformed into three kinds (of matter); (and) the three forms of Ahankara are the Vaikarika, the Taijasa and the Tamasa, which constitute the Power in substance, the Power in the organs (of sense) and the Power in the gods, O Lord.