Bhagavatapurana 3.5.30

3.5.30

vaikārikas taijasaś ca tāmasaś cety ahaṃ tridhā /
ahaṃ-tattvād vikurvāṇān mano vaikārikād abhūt /
vaikārikāś ca ye devā arthābhivyañjanaṃ yataḥ //

30. Ahankara is of three kinds as Vaikarika, Taijasa, and Tamasa? Aham-tattva undergoing modification, the Manas was produced out of the Vaikarika, as also the gods who are Vaikarikas (as invested with Vaikarika Ahankara), and from whom the objects of the senses perceive light (by whom the objects are brought to light or evolved).