大方廣圓覺修多羅了義經 1.66

1.66

「若諸菩薩以寂靜慧，復現幻力種種變化度諸眾生，後斷煩惱而入寂滅；此菩薩者，名先修奢摩他，中修三摩鉢提，後修禪那。

"If bodhisattvas, through quiescent wisdom, again manifest illusory power in various transformations to liberate sentient beings, and later sever kleśas and enter quiescence, these bodhisattvas are called those who first cultivate śamatha, intermediate cultivate samāpatti, and later cultivate dhyāna.