Garudapurana 1.141.14

1.141.14

vāyau vāyuśca viyati tvākāśau yātyahaṅkṛtau /
ahaṃ buddhau matirjove jīvo 'vyakte tadātmani //

into air, air into the ether, and the ether dissolves into ego; / ego into intellect, intellect into the individual soul, the individual soul into the unmanifest, and that into the Self;